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This project is located in Nanchang City, Jiangxi Province. It is a semiconductor Fab invested and newly built by Tianjin North in Nanchang. During the photolithography and etching processes, a large amount of volatile organic waste gas is generated, including PGME, PGMEA, and other components, with a processing air volume of 45000m 3/ Hr, emission concentration is 300mg/m 3。
Zeolite wheel+TO
15times
Design scheme：
The project adopts a treatment plan of zeolite rotary concentration+direct combustion thermal oxidation (TO). The exhaust gas is transported to the zeolite runner through the main process fan, and the VOCs in the exhaust gas are adsorbed by the zeolite and discharged into the atmosphere after reaching the standard. The hot gas transported by the desorption fan desorbs the VOCs from the zeolite, and then transported to the TO reactor by the TO fan, where they are oxidized into CO2 and H2O, and discharged into the atmosphere after reaching the standard.
Acceptance status：
The emission concentration and rate of VOCs in the exhaust gas treated by this system can meet the limit requirements of the electronic industry semiconductor manufacturing industry in Table 2 of the "Emission Control Standard for Volatile Organic Compounds in Industrial Enterprises" (DB 12/524-2014) in Tianjin. The exhaust gas purification rate can reach over 90% and there is no secondary pollution.
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